EL-FLOW® Mass Flow Meters / Controllers

EL-FLOW® Metal Sealed Gas Mass Flow Meters / Controllers

General

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Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4″ face seal male (VCR) connections.

lowest range 0,1…5 mln/min highest range 0,6… 100 ln/min

Metal Sealed Mass Flow Meter/Controller with fieldbus interface

Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW®design features Multi Gas / Multi Range functionality, providing (OEM-)customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.