For High Purity Gas Supply with Fast Response - Multi Fluid / Multi Range. Flow ranges from 0,12 mln/min up to 50 ln/min


EL-FLOW® Metal Sealed Mass Flow Meters / Controllers

For High Purity Gas Supply

Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor and solar industry requirements as well as other high purity gas applications. The base blocks of the Mass Flow Meters and Controllers have 1/4" face seal male (VCR) connections.

  • Lowest range 0,12...6 mln/min
  • Highest range 1... 50 ln/min

Metal Sealed Mass Flow Meter/Controller with fieldbus interface

Todays instruments are equipped with a digital pc-board, offering high-accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The latest EL-FLOW®design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides easy to use configuration software.


  • Resealable metal-to-metal outer seal construction (no rings) 
  • Electropolished wetted parts
  • Cleanroom assembled
  • Analog and digital I/O, with optionally integrated interface to CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS
  • High accuracy and repeatability
  • Stable control, even at varying process volumes

Metal Sealed Mass Flow and Pressure brochure   

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