Ultra compact Mass Flow Meters / Controllers - World's Smallest MFM / MFC ! Flow ranges from 0,2 mln/min up to 5 ln/min



World's Smallest Mass Flow Meter / Controller

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system.

Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure meters and controllers.

  • Lowest range 0,2...10 mln/min
  • Highest range 0,1...5 ln/min

High intrinsic quality, featuring...

  • Compact assembly ensures space efficiency
  • Economical solution, low cost of ownership
  • Analog or digital communication
  • Top-mount modules; easily accessible
  • Pre-tested “Plug and Play” manifold assemblies, reducing custom testing requirements


Examples of analytical applications based on the ultra compact modules with a footprint of 0.75” are:

  • Flow – Pressure control at the injector side of a GC
  • Flow control at the detector side of a GC or HPLC
  • Flow control in an FID (Flame Ionisation Detector)

Application story

  • Monitoring of indoor air quality
  • Gas dosing for bacterial growth
  • Gas chromatography

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